NeuVision combines our wealth of PLA experience with user-friendly software to
create an alignment system that easily adapts to a broad range of application
challenges. With NeuVision installed on your PLAs, you can:
Automatically align on irregular wafer surfaces such as metal layers or
other noisy or low return thin films.
Define your own alignment marks. While the Chevron Scheme can be
used, it is not required for automatic alignment significantly increasing
the capture area and eliminating the cost of retooling masks.
Program alignment tolerances to match production goals. Extremely tight alignment, 1 um 3 sigma,
can be achieved reliably, throughput can be increased by relaxing tolerance specifications.
Reduce wafer to mask contacts and decrease defect densities associated with resist lift off.